专利名称：HETEROGENEOUS ANNEALING METHOD
AND DEVICE
发明人：Paul M. Enquist,Gaius Gillman Fountain申请号：US15639194申请日：20170630
公开号：US20170301656A1公开日：20171019
专利附图：
摘要：A method of integrating a first substrate having a first surface with a firstinsulating material and a first contact structure with a second substrate having a secondsurface with a second insulating material and a second contact structure. The firstinsulating material is directly bonded to the second insulating material. A portion of thefirst substrate is removed to leave a remaining portion. A third substrate having acoefficient of thermal expansion (CTE) substantially the same as a CTE of the firstsubstrate is bonded to the remaining portion. The bonded substrates are heated tofacilitate electrical contact between the first and second contact structures. The thirdsubstrate is removed after heating to provided a bonded structure with reliable electricalcontacts.
申请人：ZIPTRONIX, INC.
地址：San Jose CA US
国籍：US
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